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上海绘吉电子科技有限公司
上海绘吉电子科技有限公司
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1200°C三温区九通道混气高真空CVD系统 OTF-1200X-4-III-9HV-
GSL-1700X-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.
| 技术参数 | |
|---|---|
| Furnace Structure | ● Double layer steel casing with air cooling ● Two cooling fans inside to keep case temperature < 55oC. ● 内炉膛表面涂有美国进口的高温氧化铝涂层可以提高设备的加热效率，同时也可以延长炉膛的使用寿命 ● High purity Alumina refractory chamber ● Vacuum and gas mixing system is located in bottom cart with 4 wheel ● Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use |
| Power | 6 Kw |
| Voltage | AC 208-240V Single Phase, 50/60 Hz |
| Heating Element | 8 pcs1800°C grade MoSi2 heating element |
| Max. Temperature | 1700°C(< 1 hours ) |
| Continuous Temperature | 1600°C |
| Max. Heating Rate | ≤5°C/min |
| Tube Size and Materials | ● Premier Grade alumina tube made in USA ● （标配尺寸） ( 60mm) O.D.x I.D. (54mm) x 1000mm Length ● （选配尺寸） ( 80mm) O.D.x I.D. (74mm) x 1000mm Length ● Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).   |
| Heating Zone | ● Heating zone length: 457 mm (18") ● Constant Temperature Zone length: 150 mm (6")(+/-1oC) 注：由于测量手段及外部环境的影响，测量结果可能会有偏差，此参数仅供参考不作为该设备的技术指标。您购买产品需要准确的恒温区数据，请与我公司销售人员联系 |
| Temperature controllers | ● One precision digital temperature controller programmable with 50 segments. ● PID adjustable with auto tune function to ensure temperature stability within +/- 1°C. 控温仪表操作视频 ● Full protection in each controller for over-temperature and broken thermal couple. |
| Thermal Couple | B type thermal couples built in |
| Vacuum Flanges | ● Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve ● Double high temperature silicone O-ring for using under 300°C ● Porous alumina blocks included for protecting flange from heat radiation  |
| Vacuum pumps | Tow stages vacuum pump installed in bottom case: ● One Double Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10-2 torr. ● One turbo molecular pump with max. vacuum pressure of 2x10-5 torr. ● One precision vacuum sensor installed. ● Stainless steel hose tube is included for connecting to tube furnace ● Digital vacuum meter / controller installed  |
| Vacuum Sensor & display | ● Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display. ● Vacuum controller and display areinstalled in bottom cart   |
| Gas flow meter User Manual (Click to download) | ● 9 precision mass flow meters (CS200) controllers are installed in bottom cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-99% of full scale) ● one mechanical pressure meters are installed in bottom cart for monitor each gas 's pressure in mixer. ● 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.  Software and interface (optional at extra cost). Please click uderline for software operation instruction      |
| Pipe connection, valves and gas mixer | ● SS 316 1/4" pipe/fitting ● SS 316 vacuum needle valves ● 21 sets of stainless steel vacuum valves are installed outside of right side panel of cabinet to control, vacuum pump, flowing gases and two inlet gases separately. ● Please click here to see sketch of pipe connection.   |
| Dimension | Furnace: 550 x 380 x 520 Bottom case: 600x600x597 |
| Net Weight | about 100 kg |
| Shipping weight | 200 Lbs |
| Shipping package size after crating | Two cases in one plastic pallet: 45x45x35/case |
| Warranty & certificate | ● One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.) ● CE Certificate |
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