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上海尔迪仪器科技有限公司
上海尔迪仪器科技有限公司
Special plasma system Tetra 15 LF-PC
Special plasma system Tetra 15 LF-PC
Theplasma system Tetra 15 is designed for sputtering (high vacuumbased coatingtechnology), as well as for the purification processes in the preparation ofhighly pure surfaces.
Technical data:
Switch cabinet:
W 600 mm, H 1700 mm, D 800 mm
Chamber:
W 360 mm, H 150 mm, D 260 mm
Chamber volume:
approx. 15 litres
Gas supply:
2 gas channels via MFCs
Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Control
PC control (Windows) with industrial field bus
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